高分辨率紫外/可见宽波段显微物镜设计

设计一种用于目标探测的高分辨率紫外/可见宽波段显微物镜。该系统数值孔径NA=0.4、放大率＝10、像高2y=4.7 mm，在248 nm~656 nm的宽波段范围内成像，采用熔石英和萤石两种光学材料对宽波段所引起的色差进行校正。通过对系统的结构优化设计及像差平衡，使传递函数曲线的截止频率高达3 600 lp/mm，且接近衍射极限；分辨率＜0.65 m；点列图均方根半径均小于0.650 mm；场曲小于0.01 mm；畸变小于0.5 m，可完成近紫外、可见光双波段的探测任务。

High resolution ultraviolet/visible wide band microscope objective

A high resolution ultraviolet/visible wide band microscope objective used for target detection was designed. This system with numerical aperture of 0.4, magnification of 10 times, image height of 4.7 mm, imaging wavelength range of 248 nm-656 nm, used fused silica and CaF2 to calibrate the achromaticity caused by wide band. Through the system structural design and the aberration, the cut-off frequency of transfer function curve could achieve 3 600 lp/mm,which was close to the diffraction limit. The resolution was less than 0.65 μm. The root mean square of spot diagram was less than 0.650 mm. Curvature of field was less than 0.01 mm. Distortion was less than 0.5 μm. This system can complete dual-band exploration mission of near ultraviolet and visible light.