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Effects of cooling rate and post-heat treatment on properties of ZnO thin films deposited by sol-gel method |
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| Authors: | Min Su KimKwang Gug Yim Dong-Yul LeeJin Soo Kim Jong Su KimJeong-Sik Son Jae-Young Leem |
| Affiliation: | a Department of Nano Systems Engineering, Center for Nano Manufacturing, Inje University, Gimhae 621-749, Republic of Korea b Epi R&D team, Samsung LED Co. Ltd., Suwon 443-373, Republic of Korea c Division of Advanced Materials Engineering, Chonbuk National University, Jeonju 561-756, Republic of Korea d Department of Physics, Yeungnam University, Gyeongsan 712-749, Republic of Korea e Department of Visual Optics, Kyungwoon University, Gumi 730-850, Republic of Korea |
| Abstract: | Sol-gel spin-coated ZnO thin films are cooled with different rates after the pre-heat treatment. Atomic force microscopy (AFM), X-ray diffraction (XRD), Raman, and photoluminescence (PL) were carried out to investigate the effects of the cooling rate during pre-heat treatment on structural and optical properties of the ZnO thin films. The ZnO thin films cooled slowly exhibit mountain chain structure while the ones cooled rapidly have smooth surface. The ZnO thin films cooled rapidly have higher c-axis orientation compared to the ones cooled slowly. The narrower and the higher near-band-edge emission (NBE) peaks are observed in the ZnO thin films cooled rapidly. |
| Keywords: | 78.55.Et 81.20.Fw 68.55.Jk |
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