Constitutive computational modelling foundation of piezoelectronic microstructures and application to high-frequency microchip DSAW resonators

This paper establishes a piezoelectric constitutive computational approach based on generalized eigenvalue and multivariable finite element solutions with potential applications to accurate and effective analysis of layered piezoelectric microstructures of arbitrary geometries and different anisotropic materials, to ease the limitation of current computer capacity in analyzing large-scale high-frequency disturbed surface acoustic waves (DSAW) by mounted electrodes in piezoelectric devices such as microchip SAW resonators. A new incompatible generalized hybrid/mixed element GQM5 is also proposed for improving predictions of the piezoelectric surface mount thermal stresses that are shear-dominated. The (generalized) plane strain constitutive model is numerically verified for piezoelectric finite element computation. With the help of computational piezoelectricity (electro-mechanics) for general layered structures with metal electrodes and anisotropic piezoelectric substrates, some new interesting, reliable and fundamental constitutive finite element results are obtained for high-frequency piezoelectric and mechanical SAW propagations and can be used for further applications. The ST-cut FEA results agree quite well with available exact and lab solutions for free surface case. The project supported by SRF for ROCS, SEM of China, the past Rutgers Univer-Seiko Epson Joint Fund and Zhejiang Provincial NSF