Multilayer optics for XUV spectral region: technology fabrication and applications |
| |
| Authors: | S S Andreev A D Akhsakhalyan M A Bibishkin N I Chkhalo S V Gaponov S A Gusev E B Kluenkov K A Prokhorov N N Salashchenko F Schafers S Yu Zuev |
| |
| Institution: | (1) Institute for Physics of Microstructures RAS and X-Ray company, GSP105, 603600 Nizhny Novgorod, Russia;(2) BESSY II, Albert Einstein St. 15, D-12489 Berlin, FRG |
| |
| Abstract: | We present research investigations in the field of multilayer optics in X-ray and extreme ultra-violet ranges (XUV), aimed
at the development of optical elements for applications in experiments in physics and in scientific instrumentation. We discuss
normal incidence multilayer optics in the spectral region of “water window”, multilayer optics for collimation and focusing
of hard X-ray, multilayer dispersing elements for X-ray spectroscopy of high-temperature plasma, multilayer dispersing elements
for analysis of low Z-elements. Our research pays special attention to optimization of multilayer optics for projection EUV-lithography
(ψ-13nm) and short period multilayer optics. |
| |
| Keywords: | multilayer mirror reflection Spectral resolution synchrotron radiation X-ray tube soft X-ray radiation water window reflectometer EUV-lithography |
| 本文献已被 SpringerLink 等数据库收录！ |
