| 晶格原子间非简谐相互作用对离子注入的影响 |
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| 引用本文： | 刘家瑞,张建华,李毅.晶格原子间非简谐相互作用对离子注入的影响[J].物理学报,1989,38(9):1400-1405. |
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| 作者姓名： | 刘家瑞 张建华 李毅 |
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| 作者单位： | (1)天津师范大学物理系; (2)中国科学院物理研究所 |
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| 摘 要： | 本文用经典力学中推广的朗之万方程研究了离子注入中入射离子与固体的相互作用。在计入晶格原子间的非简谐力相互作用的情况下,得到了入射离子与靶原子之间的能量交换,靶原子对入射离子的核阻止本领和入射离子在靶中的投影射程分布,同时还讨论了入射离子激发的固体声子谱对核阻止的影响。将以上所得结果在低能范围与TRIM88的计算结果进行了比较,二者符合较好。
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| 关 键 词： | 离子注入 朗之万方程 晶格 固体 |
| 收稿时间： | 1988-11-02 |
THE EFFECT OF ANHARMONIC INTERACTIONS AMONG LATTICE ATOMS ON THE ION IMPLANTATION |
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| LlU JIA-RUI,ZHANG JIAN-HUA and LI YI.THE EFFECT OF ANHARMONIC INTERACTIONS AMONG LATTICE ATOMS ON THE ION IMPLANTATION[J].Acta Physica Sinica,1989,38(9):1400-1405. |
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| Authors: | LlU JIA-RUI ZHANG JIAN-HUA and LI YI |
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| Abstract: | The interactions between incident particles and solids in ion implantation have been in-vestigated based on the generalized Langevin equation of classical dynamics. Considering an-harmonic effects of interactions among lattice atoms the energy exchange between incident particles and target atoms, the nuclear stopping power and the distributions of project ranges have been calculated numerically. The effect of the phonon spectra excited by the incident particles has been discussed also. All calculations are in good agreement with the results of the program TRIM88 in the low energy range. |
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