Size effect on the static behavior of electrostatically actuated microbeams |
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Authors: | Li Yin Qin Qian Lin Wang |
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Institution: | Li Yin · Qin Qian · Lin Wang Huazhong University of Science and Technology,430074 Wuhan,China Hubei Key Laboratory for Engineering Structural Analysis and Safety Assessment,China |
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Abstract: | We present a new analytical model for electrostatically actuated microbeams to explore the size effect by using the modified couple stress theory and the minimum total potential energy principle. A material length scale parameter is introduced to represent the size-dependent characteristics of microbeams. This model also accounts for the nonlinearities associated with the mid-plane stretching force and the electrostatical force. Numerical analysis for microbeams with clamped-clamped and cantilevered conditi... |
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Keywords: | Electrostatically actuated microbeam · Size effect · Deffection · Pull-in voltage · MEMS |
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