| 全硅矩形截面脊形波导的研制及其损耗分析 |
| |
| 引用本文： | 赵策洲 刘恩科. 全硅矩形截面脊形波导的研制及其损耗分析[J]. 光学学报, 1994, 14(10): 054-1058 |
| |
| 作者姓名： | 赵策洲 刘恩科 |
| |
| 作者单位： | 西安电子科技大学微电子所，西安交通大学电子工程系 |
| |
| 摘 要： | 运用有效折射率法和微分法分别对全硅矩形截面脊形波导的模式特性和模吸收损耗系数作了分析，通过乙二胺－邻苯二酚水溶液（ＥＰＷ）各向异性腐蚀的方法，研制成了矩形截面脊形全硅光波导，并对其损耗特性进行了研究和讨论。
|
| 关 键 词： | 硅 脊形波导 集成光学 损耗 |
| 收稿时间： | 1993-08-03 |
Fabrication of All-Silicon Ridge Waveguide with Rectangular Cross-Section and Its Loss Analysis |
| |
| Zhao Cezhou. Fabrication of All-Silicon Ridge Waveguide with Rectangular Cross-Section and Its Loss Analysis[J]. Acta Optica Sinica, 1994, 14(10): 054-1058 |
| |
| Authors: | Zhao Cezhou |
| |
| Abstract: | Based on the effective index method and the differentution medthod, modes characteristic and modes absorption loss coefficient of all sillion ridge waveguide with rectangular cross-section are analysed. By using anistropic etching with Ethlendiamine Pyrocatechol-Water Solution (EPW ), all-silicon ridge waveguides with rectangular cross-section have been fabricated, and its loss characteristics have been discussed and analysed. |
| |
| Keywords: | silicon ridge waveguide integrated optics absorption loss. |
| 本文献已被 CNKI 维普 等数据库收录！ |
