Microstructure control of low-resistivity tin-doped indium oxide films grown by photoreaction of nanoparticles using a KrF excimer laser at room temperature |
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Authors: | T Tsuchiya F Yamaguchi I Morimoto T Nakajima T Kumagai |
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Institution: | (1) Ichikawa Research Laboratory, Sumitomo Metal Mining Co., Ltd., Nakakokubun, Ichikawa-shi, Chiba 272-8588, Japan |
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Abstract: | A tin-doped indium oxide (ITO) film on a SiO2 substrate was prepared by photo-irradiation of spin-coated nanoparticles using a Xe excimer lamp and a KrF excimer laser.
The effects of the excimer lamp and the excimer laser on the resistivity, mobility, and carrier concentration of the film
were investigated. To better understand how to control the microstructure of the film, we investigated the effect of thickness
on the resistivity of a film prepared by the two-step process, and found that the resistivity was higher in a thicker film.
Using two-step irradiation plus one-step KrF irradiation in N2 at room temperature, we produced an ITO film with lowest resistivity of any in this study. The electrical resistivity of
this film was 5.94×10−4 Ω cm. On the other hand, when using a simple thermal process, the resistivity of a film sintered at 500°C in N2 was 4.10×10−3 Ω cm. The differences in resistivity are discussed on the basis of the microstructure of the films using atomic force microscopy
and Hall measurements. |
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