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二维表面浮雕结构的矢量衍射分析
引用本文:鱼卫星,卢振武,王鹏,翁志成. 二维表面浮雕结构的矢量衍射分析[J]. 光学学报, 2001, 21(8): 80-986
作者姓名:鱼卫星  卢振武  王鹏  翁志成
作者单位:中国科学院长春光学精密机械与;中国科学院长春光学精密机械与;中国科学院长春光学精密机械与;中国科学院长春光学精密机械与
摘    要:利用等效介质理论,通过严格的耦合波理论计算和分析了二维表面浮雕结构的反射效率与各种因素的关系,给出了不同情况下的变化曲线;同时计算出了该结构在正入射情况下的等效折射率系数。明确提出:不管是对称的还是非对称的二维表面浮雕结构,方位角和极化角的变化对其反射率的影响都不明显;从而得出二维表了雕结构可以实现消偏振、减反的特性。分析了该结构的带宽限制,给出了在给定结构下受限的带宽;同时对浮雕高度加工误差对反射率的影响作了分析,对实际工作有一定的指导意义。

关 键 词:矢量衍射分析  耦合波理论  表面浮雕结构  抗反射

Vector Analysis of Two-Dimensional Surface-Relief Structure Diffraction
Yu Weixing Lu Zhenwu Wang Peng Weng Zhicheng. Vector Analysis of Two-Dimensional Surface-Relief Structure Diffraction[J]. Acta Optica Sinica, 2001, 21(8): 80-986
Authors:Yu Weixing Lu Zhenwu Wang Peng Weng Zhicheng
Abstract:By using of effective medium theory, the reflective efficiency of two dimensional surface relief structure is computed and analysised in various conditions through computation of rigorous coupled wave method. Several curves are presented in various conditions. Effective medium index of that structure is computed when plane wave normalized on the structure. It is indicated that variation of orientation and polarization angle make less effect on reflectivity for both symmetric or asymmetric structure. The result giving characteristic of anti polarization and anti reflective is obtained. The bandwidth limitation is analysised and its magnitude is given. While, the effect of manufacture error of relief height on reflectivity is analysised. It has a certain instruction significance to the practical work.
Keywords:vector analysis of diffraction  theory of rigorous coupled wave  surface relief structure  antireflection
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