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Laser ablation lithography on thermoelectric semiconductor
Authors:OYu Semchuk  VN Semioshko  M Willander
Institution:a Institute of Surface Chemistry NAS of Ukraine, 17 General Naumov Street, 03164 Kyiv, Ukraine
b Goteborg University, SE-412 96 Gothenburg, Sweden
Abstract:In this paper, experimental results of the investigation of the periodic structure on thermoelectric semiconductor Cu2Se are presented. Periodic structures were formed on surfaces of semiconductors due to multi-beam interaction of Q-switched Nd:YAG laser, which was operated in the lowest order of Gaussian mode and pulse duration 7 ns. Surface temperature evolution and transient reflectivity are studied during laser treatment. Creation of Cu islands in the maximal intensity of interference pattern was found.
Keywords:Laser ablation  Fluence  Laser-induced structures  Surface  Thermoelectric semiconductors  Cooper islands
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