Study on differential algebraic method for electron optical properties of wide electron beams in immersion electrostatic-magnetic lenses

Differential algebraic method for calculation of electron optical properties is extended to wide electron beams in combined immersion electrostatic-magnetic lenses, based on Taylor series expansion of the differential algebraic data structure of wide electron beam focusing systems. Higher order aberrations referred to off-axis central trajectories are calculated and this makes the evaluation of wide electron beam focusing properties much simplified with high-enough precision. A program was written, and a specific combined immersion electrostatic-magnetic lens is calculated as an example. Computed results show that the second aperture aberrations referred to off-axis central trajectories of the system of the primary one, whereas the third- and over third-order ones only play a secondary role.