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Periodic surface nanostructures on polycrystalline ZnO induced by femtosecond laser pulses
Authors:Weiwei Liang  Feng Chen  Hao Bian  Qing Yang  Xianhua Wang  Jinhai Si  Xun Hou
Affiliation:a Key Laboratory for Physical Electronics and Devices of the Ministry of Education, Shaanxi Province, School of Electronics and Information Engineering, Xi’an Jiaotong University, No. 28, Xianning West Road, Xi’an 710049, PR China
b Key Laboratory of Photonics Technology for Information, Shaanxi Province, School of Electronics and Information Engineering, Xi’an Jiaotong University, No. 28, Xianning West Road, Xi’an 710049, PR China
c State Key Laboratory for Manufacturing Systems Engineering, School of Mechanical Engineering, Xi’an Jiaotong University, No. 28, Xianning West Road, Xi’an 710049, PR China
Abstract:Periodic surface nanostructures induced by femtosecond laser pulses on polycrystalline ZnO are presented. By translating the sample line-by-line under appropriate irradiation conditions, grating-like nanostructures with an average period of 160 nm are fabricated. The dependence of surface morphologies on the processing parameters, such as laser fluence, pulse number and laser polarization, are studied by scanning electronic microscope (SEM). In addition, photoluminescence (PL) analysis at room-temperature indicates that the PL intensity of the irradiated area increases significantly compared with the un-irradiated area. Using femtosecond laser pulses irradiation to fabricate periodic surface nanostructures on polycrystalline ZnO is efficient, simple and low cost, which shows great potential applications in ZnO-based optoelectronic devices.
Keywords:Femtosecond laser pulses   Periodic surface nanostructures   Polycrystalline ZnO   Nanofabrication   Surface modification
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