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Ultimate resolution limits for scanning electron microscope immersion objective lenses |
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| Authors: | Anjam Khursheed |
| Institution: | aDepartment of Electrical Engineering, National University of Singapore, 10 Kent Ridge Crescent, Singapore 119260 |
| Abstract: | |
| Keywords: | Low voltage scanning electron microscopy |
| 本文献已被 ScienceDirect 等数据库收录！ | |