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Spectral dynamics of narrow-band F2 laser for optical lithography
Authors:H.?Tanaka  author-information"  >  author-information__contact u-icon-before"  >  mailto:tanaka@laserlab.ees.kyushu-u.ac.jp"   title="  tanaka@laserlab.ees.kyushu-u.ac.jp"   itemprop="  email"   data-track="  click"   data-track-action="  Email author"   data-track-label="  "  >Email author,A.?Takahashi,T.?Okada,T.?Ariga,R.?Nohdomi,K.?Hotta,H.?Mizoguchi
Affiliation:1.Kyushu University,Fukuoka,Japan
Abstract:We describe the spectral dynamics of a line-narrowed F 2 laser, based on numerical simulation by a newly developed simulation code. The results were compared with the experimental results and it was found that the code could predict well the performance of a line-narrowed operation of the F 2 laser. The code was also used to obtain a guideline for the optimized operation of an injection-seeded F 2 laser system. In addition, a new spectral narrowing technique for the F 2 laser has been proposed and its effectiveness was evaluated by the simulation code.
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