Elastic backscattering of electrons from surfaces

A Monte Carlo algorithm is proposed for calculating the elastic reflection coefficient, η_E, for elements. The algorithm accounts for the multiple elastic scattering of electrons in solids. The calculated values of η_E compare well with the literature data for elements with atomic number up to 47 and at primary energies above 2 keV. The proposed Monte Carlo method makes it possible to determine the functional relation between η_E and the inelastic mean free path, λ. This relation turned out to be non-linear, arid it deviates from a similar relation based on published earlier single elastic scattering model. The deviation is especially pronounced for elements with medium atomic numbers. The calculated function $\text{η}{}_{\mathrm{<mtext>E</mtext>}}\text{=}\text{f}\text{(λ)}$ offers a convenient method for determining the inelastic mean free path. The values of λ derived in the present work from published experimental values of η_E compare very well with the literature data.