RHEED from stepped surfaces and its relation to RHEED intensity oscillations observed during MBE

Multiple scattering theory is used to calculate the intensities of reflection high energy electron diffraction from periodic arrays of surface steps. The intensities are found to depend strongly on the direction of the incident beam azimuth. When the incident beam azimuth is parallel to the step edges, both the specular and diffracted beam intensities are diminished with respect to the intensities from a flat surface. When the incident beam azimuth is perpendicular to the edges, the intensities of all the beams are of the same order of magnitude as for a flat surface but some of the peak heights are oscillatory functions of the number of atoms in the topmost layer. These peak intensity oscillations are very similar to the intensity oscillations observed during molecular beam epitaxial film growth.