| 纳米晶氧化锡薄膜的接触特性 |
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| 引用本文： | 王占和,郝群,祝侃,蒋煜婧. 纳米晶氧化锡薄膜的接触特性[J]. 光学技术, 2001, 27(4): 346-347 |
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| 作者姓名： | 王占和 郝群 祝侃 蒋煜婧 |
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| 作者单位： | 1. 北京理工大学电子工程系,
2. 北京理工大学光电工程系, |
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| 基金项目： | 国家留学回国人员科研启动基金资助项目 |
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| 摘 要： | 在 Ar和 O2 气体中 ,基片温度在 15 0～ 40 0℃的条件下 ,用直流磁控溅射的方法可以制备纳米晶透明导电薄膜。实验利用 TL M模型测试了纳米晶 Sn O2 透明导电薄膜的方块电阻、单位面积薄膜的接触电阻和电极与薄膜的结合力随热处理温度的变化情况
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| 关 键 词： | 纳米晶SnO2薄膜 电极 传输线模型 接触特性 |
| 文章编号： | 1002-1582(2001)04-0346-02 |
| 修稿时间： | 2001-03-10 |
Contact properties of nanometer SnO2 thin films |
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| WANG Zhan he ,HAO Qun ,ZHU Kan ,JIANG Yu jing. Contact properties of nanometer SnO2 thin films[J]. Optical Technique, 2001, 27(4): 346-347 |
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| Authors: | WANG Zhan he HAO Qun ZHU Kan JIANG Yu jing |
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| Affiliation: | WANG Zhan he 1,HAO Qun 2,ZHU Kan 1,JIANG Yu jing 1 |
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| Abstract: | Nanometer tin oxide transparent conducting thin films are grown by the method of the direct current magnetron sputtering in a mixture gas of Ar and O 2, and substrate temperature 150～400℃. In this paper, the contact properties of the films are characterized by transmission line model. The sheet resistance and specific contact resistance of nanometer SnO2 thin films are measured. The adhesive strength between the electrodes and SnO 2 thin films is investigated by scratch test after annealing. |
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| Keywords: | nanometer SnO 2 thin films electrodes transmission line model contact properties |
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