| 磁控射频溅射三SnO_2薄膜的气敏光学特性研究 |
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| 引用本文： | 冯金垣,张华锋,汪秀华.磁控射频溅射三SnO_2薄膜的气敏光学特性研究[J].光学技术,2007,33(Z1). |
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| 作者姓名： | 冯金垣 张华锋 汪秀华 |
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| 摘 要： | 采用磁控射频溅射在玻璃基片上制备SnO2薄膜,对采用不同工艺制备的薄膜进行了XRD和常温下的膜片在CO2、乙醇中的气敏光学特性与透射光谱测试。结果表明,该薄膜在常温下对测试气体有敏感效应,会引起透射光谱的变化,并且光谱透射率的变化与波长相关。
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| 关 键 词： | 薄膜 SnO2 气敏 透射率 磁控溅射 |
Study of transmittance gas sensitive SnO2 thin film prepared by magnetic reactive sputtering |
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| FENG Jin-yuan,ZHANG Hua-feng,WANG Xiu-hua.Study of transmittance gas sensitive SnO2 thin film prepared by magnetic reactive sputtering[J].Optical Technique,2007,33(Z1). |
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| Authors: | FENG Jin-yuan ZHANG Hua-feng WANG Xiu-hua |
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| Abstract: | SnO2 thin film are prepared by magnetic reactive sputtering and tested by XRD.The gas sensing optical characteristic and the property of transmission spectrum of the film in the ethanol and CO2 are researched at the room temperature.The experimental result shows that the transmission of the thin film has changed in the testing atmosphere.The change of transmission is related with the wavelength. |
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| Keywords: | SnO2 |
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