The Effect of the Ion Assistance Energy on the Electrical Resistivity of Carbon Films Prepared by Pulsed Plasma Deposition in a Nitrogen Atmosphere |
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| Authors: | Zavidovskii I A Streletskii O A Nishchak O Yu Khaidarov A A |
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| Institution: | 1. Moscow State University, Moscow, Russia
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| Abstract: | Physics of the Solid State - Thin carbon films prepared by pulsed plasma ion-assisted deposition of graphite in an atmosphere of a mixture of argon and nitrogen are studied. The results of... |
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