| 紫外固化型聚合物高阶布拉格波导光栅滤波器 |
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| 引用本文： | 田亮,王辉,岳远斌,陈长鸣,张大明. 紫外固化型聚合物高阶布拉格波导光栅滤波器[J]. 中国光学, 2012, 0(6): 677-681 |
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| 作者姓名： | 田亮 王辉 岳远斌 陈长鸣 张大明 |
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| 作者单位： | 吉林大学电子科学与工程学院集成光电子学国家重点联合实验室,吉林长春130012 |
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| 基金项目： | 国家自然科学基金资助项目（No.61107019）;吉林省科技发展计划资助项目（No.20110315）;中国博士后科学基金资助项目（No.2011M500597）;国家教育部博士点专项基金资助项目（No.20110061120054）;吉林大学基本科研业务费专项资金资助项目（No.201103071） |
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| 摘 要： | 利用紫外固化材料SU-82005与热交联聚合物甲基丙烯酸甲酯一甲基丙烯酸缩水甘油酯[P（MMA—GMA）]分别作为波导芯层和包层材料，通过直接光刻技术，成功实现了厚度为5μm，宽度为9μm，光栅高度为4μm的起伏型高阶布拉格波导光栅滤波器。对光栅器件的谐振波长，光透射率等重要参数进行了模拟设计。测得制备的聚合物高阶布拉格波导光栅滤波器的谐振波长为1550．4nm，消光比为23dB，3-dB带宽为2nm。
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| 关 键 词： | 紫外固化 聚合物 布拉格波导光栅 滤波器 |
High-order Bragg waveguide grating filter based on ultraviolet curable polymer |
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| TIAN Liang,WANG Hui,YUE Yuan-bin,CHEN Chang-ruing,ZHANG Da-ming. High-order Bragg waveguide grating filter based on ultraviolet curable polymer[J]. Chinese Optics, 2012, 0(6): 677-681 |
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| Authors: | TIAN Liang WANG Hui YUE Yuan-bin CHEN Chang-ruing ZHANG Da-ming |
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| Affiliation: | (State Key Laboratory on Integrated Optoelectronics , College of Electronic Science and Engineering, Jilin University, Changchun 130012, China) |
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| Abstract: | Ultraviolet curable material SU-8 2005 and thermal crosslinked polymer Methyl Methacrylatel Glyci- dyl Methacrylate[ P（MMA-GMA） ] are used as the core and the cladding layer materials, respectively, and a novel high-order Bragg waveguide grating filter with a thickness of 5 μm, a width of 9 μm and a grating height of 4 μm is successfully designed and fabricated by direct photolithography technique. The characteristic pa- rameters including resonance wavelength and transmissivity are carefully simulated. The performance parame- ters of fabricated device are measured to obtain the resonance wavelength of 1 550.4 nm, the extinction ratio of 23 dB and the 3-dB bandwidth of 2 nm. |
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| Keywords: | ultraviolet-curing polymer Bragg waveguide grating filter |
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