Thermal Conductivity Measurement of Submicron-Thick Aluminium Oxide Thin Films by a Transient Thermo-Reflectance Technique |
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Authors: | BAI Su-Yuan TANG Zhen-An HUANG Zheng-Xing YU Jun WANG Jia-Qi |
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Institution: | Department of Electronic Engineering, Dalian University of Technology, Dalian 116024School of Physics and Electronic Technology, Liaoning Normal University, Dalian 116029 |
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Abstract: | Thermal conductivity of submicron-thick aluminium oxide thin films prepared by middle frequency magnetron sputtering is measured using a transient thermo-reflectance technique. A three-layer model based on transmission line theory and the genetic algorithm optimization method are employed to obtain the thermal conductivity of thin films and the interracial thermal resistance. The results show that the average thermal conductivity of 330- 1000nm aluminium oxide thin films is 3.3 Wm^-1K^-1 at room temperature. No significant thickness dependence is found. The uncertainty of the measurement is less than 10%. |
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Keywords: | 44 10 +i 66 70 -f |
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