丙酮环境下ECR微波等离子体辅助化学气相沉积类金刚石薄膜研究

利用电子回旋共振（ECR）微波等离子体辅助化学气相沉积技术、工作气氛为丙酮，在光学玻璃衬底上得到了光滑、致密、均匀的类金刚石薄膜.在工艺研究中，对等离子体中氧的存在及其作用进行了分析.原子力显微镜分析表明，薄膜的表面粗糙度小于10nm，晶粒 尺寸约为100nm.拉曼光谱和中红吸收谱研究发现，薄膜具有强烈的荧光效应，含有sp1，sp2，sp3杂化C—C，sp3杂化CH3，羰基CO、含氧多元 环以及—COOH基等.利用纳米力学探针以 及近红区红外透射谱分析了薄膜的力学及光学性能，结果表明，薄膜的显微硬度接近4 关键词： 类金刚石薄膜 ECR微波等离子体 丙酮气氛 红外光谱

Diamond-like carbon films deposited on optical glass substrate by using ECR microwave acetone plasma CVD method

Smoothing, dense and uniform nano-crystalline diamond like carbon films are pr epared by using electron cyclotron resonance (ECR) microwave acetone plasma chemical vapor deposition (CVD) method. Atomic force microscope shows that, the surface roughness of this film is less than 10nm, the average grain size is abou t 100nm, and there are no distinct Raman shift peaks. Middle infrared spectra sh ow the existence of sp1, sp2, and sp3 mixed C—C bond, sp3 mixed CH3,CO, COOH and other oxygenic hydrocarbons in the film. The micr o hardness is about 4GPa, bulk elastic modulus is about 11 GPa tested by nano-indentation. Without absorption in closed infrared area, the refractive index is 1.576 and the calculated deposition rate is 460 nm/h for the film.