| Nb/AlOx-Al/Nb超导隧道结制备氧化工艺与特性研究 |
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| 引用本文： | 卢亚鹏,曹春海,李梦月,许钦印,肖伟,房玉荣,许伟伟,康琳,陈健,吴培亨.Nb/AlOx-Al/Nb超导隧道结制备氧化工艺与特性研究[J].低温与超导,2012,40(7):35-38. |
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| 作者姓名： | 卢亚鹏 曹春海 李梦月 许钦印 肖伟 房玉荣 许伟伟 康琳 陈健 吴培亨 |
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| 作者单位： | 南京大学超导电子学研究所,南京,210093 |
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| 基金项目： | 国家自然科学基金，国家重点基础研究发展计划项目 |
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| 摘 要： | 提出一种氧的等离子氧化的方法改善结区边缘绝缘性能,降低超导隧道结的漏电流。对Al膜进行等离子氧化能够有效的改善氧化膜的绝缘性能,AES分析表明:氧化绝缘层均匀,界面清晰;应用此方法成功制备出较好性能的Nb隧道结。
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| 关 键 词： | 超导隧道结 等离子氧化 阳极氧化 制备工艺 |
Investigation of oxidation for high quality Nb/AlOx-Al/Nb Josephson tunnel junctions |
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| Lu Yapeng
,
Cao Chunhai
,
Li Mengyue
,
Xu Qinyin
,
Xiao Wei
,
Fang Yurong
,
Xu Weiwei
,
Kang Lin
,
Chen Jian
,
Wu Peiheng.Investigation of oxidation for high quality Nb/AlOx-Al/Nb Josephson tunnel junctions[J].Cryogenics and Superconductivity,2012,40(7):35-38. |
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| Authors: | Lu Yapeng Cao Chunhai Li Mengyue Xu Qinyin Xiao Wei Fang Yurong Xu Weiwei Kang Lin Chen Jian Wu Peiheng |
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| Institution: | (Research Institute of Superconductor Elecronics,Nanjing University,Nanjing 210093,China) |
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| Abstract: | A new method of oxidization for fabricating Nb Josephson junction with low leakage current was reported,which could improve the oxidation around the tunnel barrier effectively: the Al film conducted by plasma oxidation of oxygen ions with the help of RIE could improve the oxide quality of the film,and enforce the insulation property.The AES analysis shows that the oxide layer is uniform,the interface is clear.High quality junctions were fabricated. |
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| Keywords: | Superconductivity tunnel junction Plasma oxidation Anodization Fabrication process |
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