Abstract: | The chirped Mo/Si multilayer mirror in the extreme ultraviolet region is designed to obtain sub-femtosecond pulses from high-order harmonics. Numerical simulations of temporal profile of the pulses are made for superposition of incident high-order harmonics and that of reflected ones by the chirped multilayer mirror.The normal incidence reflectivity and chirp in the wavelength range of 12.5 - 16.5 nm are 6.7% ±0.5%and-3617±171 as2, respectively. Simulation results indicate that the designed chirped multilayer mirror can be used for producing 104-as pulses. |