Gas-chromatographic and mass-spectrometric determination of impurity hydrocarbons in organochlorine compounds and dichlorosilane |
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| Authors: | V M Vorotyntsev G M Mochalov M A Kolotilova E V Volkova |
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| Institution: | (1) Nizhni Novgorod State Technical University, ul. Minina 24, Nizhni Novgorod, 603600, Russia |
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| Abstract: | A procedure was proposed for the gas-chromatographic determination of impurity organic compounds in high-purity dichlorosilane with a detection limit of 0.1–0.2 ppm, which allows metrological control in the production of high-purity dichlorosilane according to the current requirements of microelectronics. |
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