激光诱导击穿光谱技术在气体检测中的研究综述

随着工业技术的发展，气体检测领域对在线检测仪器及检测技术的要求越来越高，气体成分在气体流动时会发生复杂变化，通常的检测手段傅里叶变换红外光谱技术（FTIR）、光腔衰荡技术（CRDS）、电化学传感等往往不能满足检测要求或仅对局部区域检测。激光诱导击穿光谱（LIBS）作为一种新兴的原子发射光谱分析技术，得到光谱分析领域研究者的广泛重视与研究。LIBS技术具备多元素同时检测、非侵入式、实时在线以及无需样品特殊制备等技术优势，已应用于固体、液体和气体的检测。在环境恶劣、干扰较大的气体制造及检测领域LIBS技术能够实时准确地进行检测。介绍了LIBS技术基本原理并描述等离子体物理特性的两个参数等离子体温度及等离子体电子数密度，针对LIBS技术在气体检测领域中的应用，从通过原子谱线强度比分析燃料的当量比、燃料混合气燃烧产物的气体组分、工业制造中作为保护气的氮气及稀有气体、温室气体和新能源气体的检测，以及与之相关的LIBS实验装置及实验方法的改进与优化等6个方面介绍了LIBS技术应用于气体检测领域的近些年国内外进展。对气体检测领域激光诱导击穿光谱研究的前景进行了展望。

Review of Laser-Induced Breakdown Spectroscopy in Gas Detection

With the development of industrial technology, the requirements of online detection instruments and detection technology in gas detection are becoming higher and higher. Due to the complex changes in gas composition during gas flow, common detection methods such as Fourier Transform Infrared Spectroscopy (FTIR), Cavity ring-down spectroscopy (CRDS), and Electrochemical sensors often cannot meet the detection requirements or only Local area detection. Laser-induced breakdown spectroscopy (LIBS), as an emerging atomic emission spectroscopy analysis technology, has received extensive attention and research from researchers in the field of spectral analysis. LIBS has been applied to detect solids, liquids and gases because of its advantages of simultaneous detection of multi-elements, non-invasive, real-time on-line and no special preparation of samples. LIBS technology can accurately detect in the fields of harsh environments and high interference gas manufacturing and detection. The present paper introduces the basic principle of LIBS technology and two parameters describing the physical properties of plasma. For the application of LIBS technology in the field of gas detection, This paper introduces the recent development of LIBS technology in the field of gas detection at home and abroad from the following six aspects：Fuel equivalent ratio, the gas composition of fuel mixture combustion products, nitrogen and a rare gas, greenhouse gas and new energy gas detection, as well as related LIBS experimental equipment and experimental methods improvement and optimization. Finally, the prospect of laser-induced breakdown spectroscopy in the field of gas detection has prospected.