High-performance AlGaAs-based VCSELs emitting in the 760 nm wavelength range

Vertical-cavity surface-emitting lasers (VCSELs) showing continuous-wave operation with emission wavelengths ranging between 717 and 790 nm have been fabricated. The samples are grown by solid source molecular beam epitaxy on GaAs substrates and are entirely based on the AlGaAs material system. A maximum single-mode output power of 2.0 mW is obtained at 754 nm wavelength by using the inverted surface relief technique.