Effective-viscosity approach for nonlocal electron kinetics in inductively coupled plasmas |
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Authors: | Hagelaar G J M |
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Institution: | Laboratoire Plasma et Conversion d'Energie (LAPLACE, CNRS-UPS), Batiment 3R2, Université de Toulouse, 118 Route de Narbonne, 31062 Toulouse Cedex 9, France. gerjan.hagelaar@laplace.univ-tlse.fr |
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Abstract: | In inductively coupled plasmas, nonlocal electron kinetics lead to the anomalous skin effect. We show that this can be approximately described through a fluid equation for electron momentum including a viscosity term with an effective-viscosity coefficient. The solution of this momentum equation coupled with the Maxwell equations is in good agreement with results from a particle-in-cell simulation over a wide range of conditions, reproducing the nonmonotonic structure of the anomalous skin with sometimes local negative power absorption. |
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