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Microstructures, optical and electrical properties of In-doped ZnO thin films prepared by sol-gel method |
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| Authors: | K.J. Chen S.J. Chang |
| Affiliation: | a Institute of Microelectronics & Department of Electrical Engineering, Center for Micro/Nano Science and Technology, National Cheng Kung University, Tainan 701, Taiwan b Institute of Nanotechnology and Microsystems Engineering, Center for Micro/Nano Science and Technology, National Cheng Kung University, No. 1, Ta-Hsueh Road, Tainan 701, Taiwan c Institute of Electro-Optical Science and Engineering, Center for Micro/Nano Science and Technology, National Cheng Kung University, Tainan 701, Taiwan |
| Abstract: | ZnO and indium-doped ZnO (IxZO) thin films were prepared on silica-glass substrates by the sol-gel method. The thin films were crystallized at 600 °C and 700 °C for 1 h in 6.9 × 10−1 Torr under pure O2 atmosphere. The analyzed results were compared to investigate the structural characteristics and optical properties. The surface morphology of the IxZO films was different from that of the ZnO films, and showed a thin overlay structure. In addition, the crystallization of IxZO film was depleted at higher crystallized temperatures. From XRD analysis, the ZnO and IxZO thin films possessed hexagonal structures. Notably, micro-In2O3 phases were observed in the IxZO thin films using EDS. Both of In2O3 phases and the crystallization mechanism not only improved the peeling of structure, but also improved the electrical conductivity of IxZO thin films. For the PL spectrum, the optical property of the IxZO film was raised at a higher crystallization temperature. Although the In2O3 phases reduced the structural defects of IxZO thin film, the optical effect of the residual In3+ was not enhanced completely at higher crystallized temperatures. |
| Keywords: | Sol-gel ZnO Crystallization Indium |
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