A microprocessor based autoscanner for electromigration studies in thin films |
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| Authors: | M Dhanabalan Y Syamasundara Rao K V Reddy |
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| Affiliation: | (1) Department of Physics, Indian Institute of Technology, 600 036 Madras, India |
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| Abstract: | Mass transport due to electromigration can be estimated if the diffusion coefficientD and the electromigration effective charge numberZ* are known. Neutron activated tracer scanning method determine the radioactivity at different positions. An automatic scanning system for determining the radioactive concentration profiles developed using a microprocessor is described in this paper. Using the radioactive concentration profiles the electromigration shift is determined. From this shift the electromigration effective charge numberZ* is calculated. The system developed was tested for tin thin films. |
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| Keywords: | Microprocessor based instrumentation electromigration tin thin films |
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