Preparation and characterization of Cu-Cu2O cermet films

Metal-insulator composites (cermets) find use in a wide range of applications. In this paper the preparation of cermet films by dc reactive magnetron sputtering is presented. These cermets have been characterised by measuring their electrical resistance and the properties have been correlated to the microstructure and composition. Magnetron sputtering is found to be very effective in controlling the composition of the deposited films, enabling the preparation of films with tailored properties.