高能氮离子注入人造金刚石的热稳定性

 叙述了在GLZ-100E工业离子注入机上采用20~60 keV氮离子及氮分子离子注入人造金刚石晶体的实验研究。XPS分析表明，注入离子在人造金刚石颗粒表面形成了一层较为稳定的含氮混合物层。高温差热分析（DTA）的实验表明，经氮离子束处理的金刚石，其氧化起始温度T（onset）由原来的730 ℃左右提高到800 ℃以上，且随着氮注入剂量的增加而增加，氧化速度也随之变缓；差热分析还表明，随着温度的升高，金刚石首先转化为石墨（DTA曲线上表现为吸热），然后氧化燃烧生成CO₂（放热），而注入离子能量的增加，氧化温度的提高幅度略有下降。离子注入还使其高温石墨化性能显著改善。

A STUDY OF THE HEAT RESISTANCE OF N + IMPLANTED SYNTHETIC DIAMOND

Synthetic diamond crystals implanted with 20～70 keV N⁺ have been investigated. The heat resistance of the implanted synthetic diamond crystals was measured by DTA. It shows that its heat resistance increased with the ion doses, though this enhancement slows down as the ion energy increases, it also shows that transformation of the ion implanted diamond into graphite under high temperature condition was greatly improved.