Image processing in secondary ion mass spectrometry |
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| Authors: | Wim K. Vanhoolst Pierre J. Van Espen |
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| Affiliation: | (1) Department of Chemistry, University of Antwerpen (UIA), Universiteitsplein 1, B-2610 Wilrijk, Belgium |
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| Abstract: | ![]()
The application of image processing in secondary ion mass spectrometry is discussed. The Cameca 4f SIMS uses a single microchannel plate and a highly sensitive camera in combination with an image processor with real time capabilities (Kontron IBAS). An automation procedure with image integration, extended dynamic range image acquisition and retro depth profiling is presented and illustrated with practical applications. |
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| Keywords: | SIMS image processing micro-analysis depth profiling |
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