Affiliation: | (1) Department for Micro Technology and Medical Device Technology, Technische Universit?t M?nchen, Boltzmannstr. 15, 85748 Garching, Germany;(2) Institute of Design and Production in Precision Engineering, Universit?t Stuttgart, Pfaffenwaldring 9, 70550 Stuttgart, Germany;(3) Center for Magnetic Recording Research, University of California San Diego, 9500 Gilman Drive, La Jolla, CA 92093-0401, USA |