Influence of post-annealing on the properties of Sc-doped ZnO transparent conductive films deposited by radio-frequency sputtering |
| |
Authors: | Xueqiang Liu Weihong Bi Zhaolun Liu |
| |
Institution: | Department of Photoelectronic Engineering, College of Information Science and Engineering, Yanshan University, Qinhuangdao 066004, China |
| |
Abstract: | Sc-doped ZnO transparent conductive films are deposited on glass substrates by radio-frequency sputtering. The influence of post-annealing on the structural, morphologic, electrical, and optical properties of the films is investigated by energy dispersion X-ray spectroscopy, X-ray diffraction, Hall measurement, and optical transmission spectroscopy. The experimental results show that these films are polycrystalline with a preferred 0 0 1] orientation. The lowest resistivity of 2.6 × 10−4 Ω cm is obtained from the film annealed at 500 °C. The average optical transmittance of the films is over 90%. These results suggest that Sc-doped ZnO is a good candidate for fabricating high performance transparent conductive films. |
| |
Keywords: | 42 25 Fx 42 70 Km 78 20 &minus e |
本文献已被 ScienceDirect 等数据库收录! |
|