光学器件面形误差对光束质量的影响

定量分析了光学面形误差各参数（幅度、类型、空间尺度和空间分布等）对光束质量的影响。通过数值计算得到：对于局部缺陷和环形缺陷，在规定误差均方根值时，应对缺陷空间尺茺作出相应规定，以避开光束质量因子β的极大值。中心缺陷比边缘缺陷对光束质量的破坏更大；相位误差的低频部分形成了远场能量分布的中心核，而边翼由高频部分所形成，对高频误差需要规定更严格的容差。

Influence of the Surface Error of Optical Elements on Beam Quality

The analysis is given in detail about the influence of several parameters of the surface error of optical elements including magnitude, type, scale size and distribution on the beam quality. The computation results show that, there exists an extreme value for the beam quality vs. the size of aberration; the central error is more serious than the error on the periphery; the low frequency part of the phase error forms the energy core in the far field, while the high frequency part forms the rim; and more strict tolerance should be stipulated for the error of high frequency.