| 硅基二氧化硅光波导器件偏振特性的理论分析 |
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| 引用本文： | 欧海燕,雷红兵,杨沁清,王红杰,王启明,胡雄伟. 硅基二氧化硅光波导器件偏振特性的理论分析[J]. 光学学报, 2001, 21(1): 22-124 |
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| 作者姓名： | 欧海燕 雷红兵 杨沁清 王红杰 王启明 胡雄伟 |
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| 作者单位： | 中国科学院半导体研究所集成光电子学国家重点联合实验室, 北京 100083;国家光电子工艺中心, 北京 100083 |
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| 基金项目： | 国家自然科学基金!(6 988970 1和 6 9896 2 6 0 )资助项目 |
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| 摘 要： | 从理论上分析了硅基二氧化硅光波导器件的芯区尺寸、相对折射率差、内应力和弯曲径对器件偏振特性的影响,得出结论：小折射率差的正方形波导的双折射系数小;内应力对双折射的影响比几何参数大;弯曲半径较小时,双折射系数较大,弯曲损耗也较大。
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| 关 键 词： | 偏振 线双折射 硅基二氧化硅光波导 |
Theoretical Analysis on Polarization Characteristics of Silicon-Based Silica Optical Waveguide Devices |
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| Ou Haiyan Lei Hongbing Yang Qinqing Wang Hongjie Wang Qiming. Theoretical Analysis on Polarization Characteristics of Silicon-Based Silica Optical Waveguide Devices[J]. Acta Optica Sinica, 2001, 21(1): 22-124 |
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| Authors: | Ou Haiyan Lei Hongbing Yang Qinqing Wang Hongjie Wang Qiming |
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| Abstract: | The influence of core size, relative refractive index difference, stress and bending radius of silicon based silica waveguides on polarization was analyzed. Conclusions were drawn as below: the birefringence of square waveguide with small relative index difference is small. The birefringence caused by residual stress is larger than that by core size. Small bending radius causes high birefringence and loss, so large bending radius is preferred within the permission of chip size to reduce birefringence. |
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| Keywords: | polarization birefringence silicon based silica optical waveguide |
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