微束斑X射线源及X射线光学元件

高质量的X射线源，尤其高亮度的微纳束斑X射线源是现代X射线光学高清晰成像最为关键的部件之一，在工业无损探伤、生命科学、材料科学等科学研究和实际应用中具有重要的意义。简单介绍了微束斑X射线源的产生方法及发展历史，并对微束X射线光学涉及到的聚焦X射线光学元件（如X射线掠入射反射镜、布拉格法反射镜、多层膜反射镜、多层膜光栅、X射线波带片、毛细管聚焦透镜和复合折射透镜等）的主要特点作了简要的系统介绍。最后展望了微细束X射线在微纳检测与分析等方面的应用前景。

Microfocal x-ray source and x-ray optical elements

The high quality x-ray sources,especially for the microfocal x-ray source with high-brightness are crucial components for modern x-ray imaging techniques. They are widely used in applications such as non-destructive diagnostics,life-science,material science,and biomedicine.The methods to make the microfocal x-ray source and its applications are briefly introduced.Various focusing x-ray optical elements related to microfocal x-ray,including Kirkpatrick-Baez mirror,multilayer mirror,Fresnel zone plate,Bragg-Fnesnel zone plate,polycapillary x-ray lens,multilayer blazed grating,compound refractive x-ray lens,are introduced. The potential applications for the microfocal x-ray source in mircometer and nanometer test and analysis are discussed.