Variety of iron silicides grown on Si(0 0 1) surfaces by solid phase epitaxy: Schematic phase diagram |
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Authors: | H. Nakano K. Hattori H. Daimon |
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Affiliation: | a Graduate School of Materials Science, Nara Institute of Science and Technology, Takayama 8916-5, Ikoma, Nara 630-0192, Japan b CREST-JST, Kawaguchi, Saitama 332-0012, Japan |
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Abstract: | We systematically studied the formation of various iron-silicide phases, grown on Si(0 0 1) surfaces by solid phase epitaxy, with scanning tunneling microscopy, low-energy electron diffraction and reflection high-energy electron diffraction. We found and studied the phases of c(2 × 2) islands, rectangle-like islands, elongated islands, layered islands, dome-like islands, eddy and cracked structures, and small clusters. A schematic phase diagram of these phases is successfully summarized against iron coverage at room temperature and subsequent annealing temperature. |
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Keywords: | Iron silicides Solid phase epitaxy Scanning tunneling microscopy Low energy electron diffraction Reflection high-energy electron diffraction |
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