Photoreactive fluorinated polyimide protected by a tetrahydropyranyl group (THP) based on photo-induced acidolysis

A polyimide (6F-THP) with a tetrahydropyranyl group (THP) in its side chain has been synthesized. The THP group exhibits a high acidolysis rate in this polymer's film. This rate was faster than that of a tertbutoxycarbonyl group (t-BOC), which has been previously reported 1]. Furthermore, the deprotected fluorinated polyimide (6FDA-AHHFP) became soluble in an aqueous base due to the presence of a hydroxyl group attached to the phenyl group of the diamine segment. The polyimide thus provides high performance as a photopolymer when used in conjunction with a photoacid generator after the post-exposure baking process (PEB). The photoacid generators used in this study were p-nitrobenzyl-9,10-dimethoxyanthoracene-2-sulfonate (NBAS) and diphenyliodonium-9,10-dimethoxyanthoracene-2-sulfonate (DIAS). The quantum yields of photodissociation and photoacid generation were also measured. The photoacid-generating quantum yields closely corresponded to the photosensitivities of the photoreactive polyimide system. It was confirmed that the THP group was easily deprotected even in the 6F-THP film with p-toluenesulfonic acid as a model acid catalyst. The activation energy of the THP deprotection reaction was determined to be 12.8 kcal/mol (19.5 kcal/mol in the case of t-BOC). The relationships between the THP deprotecting rate constant (k_d) and acid molecular size and between k_d and polyimide structure were further investigated.