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High-aspect-ratio microdrilling of polymers with UV laser ablation: experiment with analytical model |
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| Authors: | VN Tokarev J Lopez S Lazare F Weisbuch |
| Institution: | (1) Laboratoire de Physicochimie Moléculaire (LPCM), UMR 5803 du CNRS, Université de Bordeaux 1, 351 cours de la Libération, 33 405 Talence, France, FR;(2) General Physics Institute, ul. Vavilova 38, Moscow 117 942, Russia, RU |
| Abstract: | |
| Keywords: | PACS: 42 62 Cf 61 80 Ba 61 80 Az |
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