Low beam current density Auger spectroscopy and surface analysis

Auger and secondary electron spectroscopy become a more and more routine technique in surface characterization. Even with primary electron beam current density as low as 10^?2 or 10^?3 A cm^?2 beam damage were reported in both Auger and LEED experiments. So we developed and compared counting method, brightness modulation and Harris' modulation techniques in terms of signal to noise ratio. The two first methods offer the advantage of a primary beam current density decreasing about 10⁴ times. So various mechanisms of beam damage were identified as thermal, chemical and electrical. The advantage of the method is shown with hydrocarbons adsorption layer; the beam cracking of the organic chain produces a chemical shift of the C_KLL maximum Auger line about 5 eV. This progressive shift is observed with current densities of 10^?5 A cm^?2 order of magnitude. The reproducibility of this low current density Auger spectroscopy allowed the study of the background and the true secondary electron yield modifications when adsorbed layers are built up.