Electrical Features of Radio-frequency,Atmospheric-pressure,Bare-metallic-electrode Glow Discharges |
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Authors: | He-Ping Li Wen-Ting Sun Hua-Bo Wang Guo Li Cheng-Yu Bao |
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Institution: | (1) Department of Engineering Physics, Tsinghua University, Beijing, 100084, P.R. China;(2) Present address: Infinova (Shen Zhen) Ltd., Shen Zhen, 518053, Guangdong Province, P.R. China |
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Abstract: | Radio-frequency (RF), atmospheric-pressure glow discharge (APGD) plasmas with bare metallic electrodes have promising prospects
in the fields of plasma-aided etching, deposition, disinfection and sterilization, etc. In this paper, an induced gas discharge
approach is proposed for obtaining the RF, atmospheric-pressure, γ-mode, glow discharges with pure nitrogen or air as the
primary plasma-working gas using bare metallic electrodes. The discharge characteristics, including the discharge mode, the
breakdown voltage and discharge voltage for sustaining α mode and/or γ mode discharges, of the RF APGD plasmas of helium,
argon, nitrogen, air or their mixtures using a planar-type plasma generator are presented in this study. The uniformity (no
filaments) of the discharges is confirmed by the images taken by an iCCD with a short exposure time (10 ns). The effects of
different gap spacings and electrode materials on the discharge characteristics, the variations of the sheath thickness and
the electron number density are also studied in this paper. |
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Keywords: | Atmospheric-pressure glow discharge Radio frequency Air Nitrogen Bare metallic electrode |
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