装置参数对狭缝天线激发的等离子体表面波传播的影响

采用时域有限差分法对矩形结构装置的等离子体表面波传播进行了三维数值模拟.研究了装置参数(如介质板相对介电常数、厚度以及介质板上方空气间隙)对天线阵列激发的等离子体表面波传播的影响，给出了合适的介质板相对介电常数和厚度，并指出空气间隙的存在会严重削弱天线阵列对表面波的激发.计算结果可为大面积矩形表面波等离子体源装置的优化设计提供参考.关键词：时域有限差分法等离子体表面波狭缝天线

Effect of device parameters on propagation of plasma surface wave excited by slot antenna

The plasma surface wave propagation in a rectangular structured device is simulated using the finite-difference time-domain method. The effect of device parameters on the propagation of plasma surface wave excited by slot antenna array is investigated. The parameters considered include the relative permittivity and thickness of dielectric slab, and the air gap on the top of dielectric slab. Appropriate parameters for the relative permittivity and thickness of dielectric slab are obtained through simulations, and it is found that the existence of air gap would greatly weaken the excitation of surface wave. The simulation results provide a good reference for the design optimization of large-scale rectangular surface-wave plasma source.