TEM investigations on PECVD-titanium carbide layers |
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Authors: | Birgit Arnold and Ingolf Endler |
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Institution: | (1) IFW Dresden e.V., Postfach, D-01171 Dresden, Germany |
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Abstract: | TiCx-PECVD-layers were characterized by TEM. EDX analysis and electron diffraction. TiCx-layers deposited using benzene showed a columnar structure, at which the column size decreases with rising excess carbon content. TiCx-layers deposited using n-heptane presented a lamellar structure, at which the lamellar thickness diminishes with an increasing excess carbon content. In dependence on the layer thickness a periodic progress of the element contents was observed, at which a maximum for Ti and Cl correlates with a minimum for C. It was found that the incorporated chlorine is bonded to titanium. The lattice parameter depends on the chlorine content. Using TiCl4/H2/Ar-gas mixtures without any hydrocarbon, layers containing TiH2 are formed. |
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