Molecular kinetic aspects of vaporization of volatile coordination compounds with organic ligands

We present results of the experimental study and numerical simulation of radiation-convective heat and mass transfer during the sublimation of spherical particles of metal β-diketonates in a high-temperature inert gas flow (argon or helium). The sublimation process is visualized, and experimental data on the temperature variation dynamics and particle size are obtained. It is shown that at stable transfer of the compound from the particle surface the sublimation proceeds with the formation of large pores in its structure. The effect of inert gas properties on the kinetics of the vaporization process of precursor particles with various initial diameters is analyzed in the temperature range from 200 °C to 330 °C. Due to a higher thermal conductivity and heat capacity of helium as compared with argon, the choice of helium as carrier gas causes an increase in the sublimation intensity.