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Key methods for intensifying soft X-ray emission from a laser plasma for lithography |
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| Authors: | A A Andreev V G Nikolaev K Yu Platonov Yu A Kurakin |
| Institution: | (1) Institute of Laser Physics, Vavilov State Optical Institute, Birzhevaya liniya 12, St. Petersburg, 199034, Russia;(2) St. Petersburg State Technical University, Politekhnicheskaya ul. 29, St. Petersburg, 195434, Russia;(3) Ioffe Physicotechnical Institute, Russian Academy of Sciences, Politekhnicheskaya ul. 26, St. Petersburg, 194021, Russia |
| Abstract: | A two-pulse two-wave (Nd and CO2 lasers) scheme is proposed for irradiating a laser target, which ensures the highest factor of laser radiation conversion to the X-ray range (13.5 nm ± 1%). Analytic estimates are obtained for parameters of pulses and of the target made of Xe or Li. Numerical optimization is performed for X-ray emission from a spherical Xe target exposed to a CO2 laser pulse. The maximal factor of conversion of laser radiation to X rays is ～1%. Angular and spectral characteristics of X-ray radiation are obtained. The flux of fast Xe ions ejected from the target and damaging the Mo/Si coating of X-ray mirrors is estimated. |
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