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Energy loss spectra of low primary energy (E0 ? 1 keV) electrons backscattered by silicon dioxide
Authors:Maurizio Dapor
Affiliation:ITC-irst and Dipartimento di Fisica dell’Università di Trento, via Sommarive 18, I-38050 Povo, Trento, Italy
Abstract:
A Monte Carlo simulation is described and utilized to calculate the energy distribution spectra of the electrons backscattered by silicon dioxide. Spectra are presented for incident energies of 250 eV, 500 eV, and 1000 eV. Spectra interpretation is based on a semiquantitative valence-band structure model for SiO2 crystals.
Keywords:Computer simulations   Monte Carlo simulations   Electron solid interactions   Scattering   Diffraction
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