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Zone specificity in low energy electron stimulated desorption of Cl from reconstructed Si(1 1 1)-7 × 7:Cl surfaces
Authors:Doogie Oh  Thomas M Orlando
Institution:a School of Chemistry and Biochemistry, Georgia Institute of Technology, Atlanta, GA 30332, United States
b Intel Corporation, Hillsboro, OR 97006, United States
c School of Physics, Georgia Institute of Technology, Atlanta, GA 30332, United States
Abstract:Diffraction in electron stimulated desorption has revealed a propensity for Cl+ desorption from rest atom vs. adatom areas and unfaulted vs. faulted zones of Cl-terminated Si(1 1 1)-(7 × 7) surfaces. We associate the 15 eV ± 1 eV threshold with ionization of Si-Cl σ-bonding surface states and formation of screened two-hole states with Si 3s character. Similar specificity is observed from A and B reconstructions. This can be due to reduced screening in unfaulted regions and increased hole localization in Si back-bonds within faulted regions.
Keywords:Electron-solid interactions  Electron-solid diffraction  Electron stimulated desorption  Silicon  Chlorine
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