| 光学显微镜与CCD监视器组合的原子力显微镜 |
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| 引用本文： | 章海军,黄文浩.光学显微镜与CCD监视器组合的原子力显微镜[J].光子学报,1996,25(3):217-220. |
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| 作者姓名： | 章海军 黄文浩 |
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| 作者单位： | 中国科技大学精密机械与精密仪器系 合肥 230026 |
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| 基金项目： | 国家自然科学基金;中国博士后科学基金 |
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| 摘 要： | 研制了一种与光学显微镜结合并配置 CCD 监视器的原子力显微镜,可同时获得样品的原子力显微镜图象及光学图象.已能分辨出5纳米的精细结构,最大扫描范围可达2μm.文中给出了本仪器获得的一些样品图象结果.
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| 关 键 词： | 原子力显微镜 光学显微镜 微悬臂(针尖) 扫描 |
| 收稿时间： | 1995-01-03 |
ATOMIC FORCE MICROSCOPE WITH OPTICAL MICROSCOPE AND CCD MONITOR |
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| Zhang Haijun,Huang Wenhao,Tu Chengjie,Chu Jiaru.ATOMIC FORCE MICROSCOPE WITH OPTICAL MICROSCOPE AND CCD MONITOR[J].Acta Photonica Sinica,1996,25(3):217-220. |
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| Authors: | Zhang Haijun Huang Wenhao Tu Chengjie Chu Jiaru |
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| Institution: | Department of Precision Machinery, University of Science and Technology of China, Hefei 230026, P. R. China |
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| Abstract: | An advanced atomic force microscope (AFM) with an optical microscope (OM) and CCD monitor to obtain simultaneously AFM and OM images has been developed.The AFM/OM combined instrument is able to resolve sample down to 5nm scale,and covers a wide scanning range up to 2μm. Some sample results obtained with AFM/OM are presented. |
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| Keywords: | AFM Optical microscope Cantilever(tip) Scanning |
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